適用於無機化學分析(ICP、ICP-MS)的超純水純化方法
ICP、ICP-MS幾乎可以有效的分析所有元素，因此被廣泛的使用於半導體產業、核工領域，以及環境樣品的元素分析。尤其是 ICP-MS，由於可以進行極微量的金屬分析，因此所使用的超純水，其金屬是要去除到極限的。
超純水系統的純化方法中，用來去除離子的是離子交換樹脂，因此維持樹脂的交換能力是很重要的。離子交換樹脂除了會因為官能基飽和而降低去除能力外，樹脂表面也會發生有機物質與微生物的附著，所以在離子交換樹脂的前段處理程序中，最好使用紫外線燈來氧化分解有機物質，以防止樹脂被污染。此外，為了儘早發覺樹脂的劣化，所以可以在前段的離子交換管匣之後裝上比阻抗計，以偵測水質的變化（圖１）。這種超純水系統的組合，對水中所含元素的偵測靈敏度可達 ppt 級。
影響 ICP-MS 分析的因素中，包含容器的清淨度與溶出 (extraction) 問題。當我們進行極微量的無機離子分析時，必須使用高純淨度以及不易溶出金屬離子的容器。關於其它的技術問題，如 Nebulizer 產生氣泡現象，以及 K、Ca 等離子的檢測訊號會受到 Ar 的影響，可藉去除水中溶解氣體來解決問題。
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